Focused ion beam milling of microchannels in lithium niobate.

Nanostructuring lithium niobate substrates by focused ion beam milling

Photonic crystal structures with ultrahigh aspect ratio in lithium niobate fabricated by focused ion beam milling

Lithium niobate LiNbO3, LN is an important material which is widely applied in fabricating photonic and acoustic devices. However, it is difficult to either wet etch or dry etch LN due to the material’s properties. Here, the authors report novel pattern fabrication based on LN using focused ion beam FIB milling. When an array of small holes is etched, a severe tapering problem is observed as is...

Suspended slab and photonic crystal waveguides in lithium niobate

Suspended waveguides have been widely applied to silicon-on-insulator structures because they are easily fabricated with processing techniques similar to those of integrated circuit design. However, it is difficult to fabricate such structures in lithium niobate, which is also a very important material for optoelectronics. One main challenge is the difficulty of etching lithium niobate. In this...

Conicity and depth effects on the optical transmission of lithium liobate photonic crystals patterned by focused ion beam

We report on novel focused ion beam fabrication techniques that can greatly improve the optical performance of photonic crystal structures. The finite depth and conicity effects of holes and trenches in Lithium Niobate (LN) photonic crystals have been theoretically analyzed, showing that the conicity causes refraction into the bulk sample, resulting in high transmission loss and no useful spect...

High aspect ratio LiNbO3 photonic crystals Toward 3D LiNbO3 micro and nano structures

We report easy to implement techniques for the fabrication of high aspect ratio LiNbO3 photonic crystals. The methods rely on optical grade dicing followed by focused ion beam (FIB) milling. A 2D photonic crystal with an extinction ratio of -14dB is demonstrated. We show how the techniques can be combined for the development of 3D photonic crystals. LiNbO3, ridge waveguides; photonic crystals,